SEMI P15-92 DETERMINATION OF SODIUM AND POTASSIUM IN POSITIVE.pdf

SEMI P15-92
DETERMINATION OF SODIUM AND POTASSIUM N POSITVE
PHOTORESIST METAL ION FREE(MIF)DEVELOPERS BY ATOMIC
ABSORPTION SPECTROSCOPY
1 Scope
5 Calculation
This procedure is a flame atomic absorption analytical
method for sodium and potassium analysis in photore
Abs Sample x ppm Standard XR
sist MIF developers. The applicable concentration
ppm(mg/kg
Abs. Standard
range is 20 to 1000 ppb
R= Recovery factor due to sample viscosity if applica
2 Instrument Conditions
2.1 Atomic Absorption Spectromeler-the analytical NOTICE: These standards do not purport to address
wavelength for sodium is 589 nm and for potassium 1s safety issues. if anv. associated with their use. It is the
766 nm. The instrument conditions (1.e, slit width, responsibility of the user of these standards to establish
burner gas flow rates) should be set according to the appropriate safety and health practices and determine
manufacturer's manual. Optimize the nebulizer and the applicability of regulatory limitations prior to use
lamp alignment to maximize the absorbance of the SEMI makes no warranties or representations as to the
I ppm standard
suitability of the standards set forth herein for any par-
cular application
tion of the suitabilit
3 Standard
of the standard is solely the
ibility of the
The standards should be weight/weight (mg/kg)and Users are cautioned to refer to manufacturers instruc
Id be diluted weight/weight since results will be
duct labels, product data sheets, and oth
expressed in mg/kg
relevant literature respecting any materlals mentioned
herein. These standards are subject to change without
The standards are prepared by diluting a concentrate
notice
stock. For example, a 500 ppm standard of sodium is
diluted to 50 ppm with de-ionized water. This solution The users attention is called to the possibillity that
is then diluted to I ppm
compliance with this standard may require use o
copyrighted material or of an invention covered by
4 Procedure
patent rights. By publication of this standard, SEMI
No sample preparation nor dilution is required
takes no position respecting the validity of any patent
nts or copyrights asserted in ce
Set the absorbance reading to zero with the fame item mentioned in this standard. Users of this standard
ignited and no sample aspirating. Measure the absor-are expressly advised that determina
bance of the I ppm standards and samples. The absor-patent rights or copyrights, and the risk of infringe
bance of the standard should be in the range of 0.2 ment of such rights, are entirely their own responsibil
absorbance Duplicate sample and standard readings
should be within 0.01 absorbance, The effect of viscos
ity on delivery to the burner can be determined by add
ing 2 ppm of a potassium internal standard to the
sample and checking the absorbance versus an external
2 ppm potassium standard. The potassium level in the
developer, if any, should be subtracted
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