书签 分享 收藏 举报 版权申诉 / 1

类型SEMI P15-92 DETERMINATION OF SODIUM AND POTASSIUM IN POSITIVE.pdf

  • 上传人:jxf841103
  • 文档编号:98523520
  • 上传时间:2017-06-17
  • 格式:PDF
  • 页数:1
  • 大小:57KB
  • 配套讲稿:

    如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。

    特殊限制:

    部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。

    关 键  词:
    SEMI P15-92 DETERMINATION OF SODIUM AND POTASSIUM IN POSITIVE P15 92
    资源描述:
    SEMI P15-92
    DETERMINATION OF SODIUM AND POTASSIUM N POSITVE
    PHOTORESIST METAL ION FREE(MIF)DEVELOPERS BY ATOMIC
    ABSORPTION SPECTROSCOPY
    1 Scope
    5 Calculation
    This procedure is a flame atomic absorption analytical
    method for sodium and potassium analysis in photore
    Abs Sample x ppm Standard XR
    sist MIF developers. The applicable concentration
    ppm(mg/kg
    Abs. Standard
    range is 20 to 1000 ppb
    R= Recovery factor due to sample viscosity if applica
    2 Instrument Conditions
    2.1 Atomic Absorption Spectromeler-the analytical NOTICE: These standards do not purport to address
    wavelength for sodium is 589 nm and for potassium 1s safety issues. if anv. associated with their use. It is the
    766 nm. The instrument conditions (1.e, slit width, responsibility of the user of these standards to establish
    burner gas flow rates) should be set according to the appropriate safety and health practices and determine
    manufacturer's manual. Optimize the nebulizer and the applicability of regulatory limitations prior to use
    lamp alignment to maximize the absorbance of the SEMI makes no warranties or representations as to the
    I ppm standard
    suitability of the standards set forth herein for any par-
    cular application
    tion of the suitabilit
    3 Standard
    of the standard is solely the
    ibility of the
    The standards should be weight/weight (mg/kg)and Users are cautioned to refer to manufacturers instruc
    Id be diluted weight/weight since results will be
    duct labels, product data sheets, and oth
    expressed in mg/kg
    relevant literature respecting any materlals mentioned
    herein. These standards are subject to change without
    The standards are prepared by diluting a concentrate
    notice
    stock. For example, a 500 ppm standard of sodium is
    diluted to 50 ppm with de-ionized water. This solution The users attention is called to the possibillity that
    is then diluted to I ppm
    compliance with this standard may require use o
    copyrighted material or of an invention covered by
    4 Procedure
    patent rights. By publication of this standard, SEMI
    No sample preparation nor dilution is required
    takes no position respecting the validity of any patent
    nts or copyrights asserted in ce
    Set the absorbance reading to zero with the fame item mentioned in this standard. Users of this standard
    ignited and no sample aspirating. Measure the absor-are expressly advised that determina
    bance of the I ppm standards and samples. The absor-patent rights or copyrights, and the risk of infringe
    bance of the standard should be in the range of 0.2 ment of such rights, are entirely their own responsibil
    absorbance Duplicate sample and standard readings
    should be within 0.01 absorbance, The effect of viscos
    ity on delivery to the burner can be determined by add
    ing 2 ppm of a potassium internal standard to the
    sample and checking the absorbance versus an external
    2 ppm potassium standard. The potassium level in the
    developer, if any, should be subtracted
    Copyright by
    (Semiconductor Fquipment and Materials International
    SEMI P15-920SEMI1992.1996
    )5 last Middicficld Road Mountain Vicw. CA94043
    Rcproduction of the contents in whole or in part is forbidden without
    express written consent of' SFMI
    展开阅读全文
    提示  文档分享网所有资源均是用户自行上传分享,仅供网友学习交流,未经上传用户书面授权,请勿作他用。
    关于本文
    本文标题:SEMI P15-92 DETERMINATION OF SODIUM AND POTASSIUM IN POSITIVE.pdf
    链接地址:https://www.wdfxw.net/doc98523520.htm
    关于我们 - 网站声明 - 网站地图 - 资源地图 - 友情链接 - 网站客服 - 联系我们

    版权所有:www.WDFXW.net 

    鲁ICP备09066343号-25 

    联系QQ: 200681278 或 335718200

    收起
    展开