第20卷第2期
粉末治金材料科学与工程
2015年4月
Vol 20 No. 2
Materials Science and Engineering of Powder Metallurgy
Apr.2015
化学气相沉积ZxO2涂层的表面微观形貌演变
郝振华,郝安林2,熊翔
(.中南大学粉末治金国家重点实验室,长沙410083:2.安阳工学院,安阳455000
摘要:采用ZrCl4-CO2-H2-Ar体系,在不同温度或氢气流量条件下采用常压化学气相沉积法( APCVD)通过不同
沉积流程在CC样品表面制备ZrO2涂层。用X射线衍射分析仪(XRD)和扫描电镜(SEM)分析涂层的物相组成和形
貌特征。结果表明:随沉积温度升高,2ZrO2涂层表面形貌由小颗粒堆积态向大尺寸多晶转变;氢气流量为0时,
只在局部区域出现了少量ZrO2,当氢气流量为400mL/min时,ZrO2涂层晶粒尺寸较大且晶体学平面特征最明显;
在氢气流量为800 ML/min时沉积出现了副产物ZrC与C;在氢气流量为1600mL/min时,出现沉积副产物ZrC
连续沉积时,得到的ZrO2涂层为山峰状形貌
关键词:化学气相沉积;氧化锆涂层;微观形貌
中图分类号:TQ134.
文献标识码:A
文章编号:1673-0224(2015)2-237-07
Surface morphology evolution of Zro2 coatings by
chemical vapor deposition
HAO Zhen-hua, HAO An-lin, XIONG xiang
(1. State Key aboratory of Powder Metallurgy, Central South University, Changsha 410083, China;
2. Anyang Institute of Technology, Anyang 455000, China)
Abstract: Zirconia(Z 2 coatings were deposited on CC samples by atmospheric pressure chemical vapor deposition
(APCVD)from Zrcl -C2 -H -Ar system with different parameters. The phase composition and surface morphologies of
the Zro coatings were investigated by X-ray diffractometry (XRD)and scanning electronic microscopy(SEM). The
experimental results show that the surface morphology of the coating changes from accumulation of small grains to
polycrystals with large size as the temperature increases. Only a little Zro is found in part of the sample surface when
prepared with no hydrogen, and the Zro crystals are larger and have obvious characteristic of crystallographic plane
when the hydrogen flow rate is 400 ml/min; the byproduct of C and Zrc is obtained when the hydrogen flow rate is 800
ml/min, and the byproduct of Zrc are obtained when the hydrogen flow rate is 1 600 ml/min. The surface morphology
of Zro 2 coatings looks like mountain-peak when deposited constantly
Key words: chemical vapor deposition; Zirconia coatings; morphology
C/C复合材料具有低密度、高比强度、高比模量烧蚀性能好,国内外研究学者已经采用难熔金属碳化
以及优异的抗烧蚀和抗热震性能,是理想的航空航天物来改进CC复合材料的烧蚀性能5。其中,ZrC在
高温部件材料。然而,CC复合材料在高于500℃高温条件下的抗烧蚀性能一方面是由于其自身良好的
的有氧环境中即开始急剧氧化,大大限制了其在新型高温性能,另一方面是由于ZrC的氧化产物ZrO2可以
航空器上的应用2。因此,改善C/C复合材料在高形成保护层,阻止ZC的进一步氧化』。李贺军
温、高速气流下的抗烧蚀性能,研制新一代耐烧蚀CC等采用金属盐溶液浸渍法制备了ZrC改性C/C复
复合材料意义重大
合材料,重点研究了烧蚀产物2ZrO2对ZrC改性C/C
难熔金属碳化物如ZrC,HC,TaC等熔点高、抗复合材料炕蚀性能的影响,从側面反映了ZrO2涂层的
基金项目:国家重点基础研究发展计划(2011CB605805)
收稿目期:2014-04-08;修订日期:2014-06-20
通讯作者:熊翔,授,博士。电话:0731-8836079;E-mail:Xiong228@sina.com
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