ANSI ESD STM11.11-2021平面材料表面电阻测量.pdf

ANSI/ESD STM11.11-2021 Revision of ANSI/ESD STM11.11-2015 for the Protection of Electrostatic Discharge Susceptible Items Surface Resistance Measurement of Planar Materials Electrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440-2069 An American National Standard Approved July 12, 2021ANSI/ESD STM11.11-2021 ESD Association Standard Test Method for the Protection of Electrostatic Discharge Susceptible Items Surface Resistance Measurement of Planar Materials Approved January 26, 2021 EOS/ESD Association, Inc. ANSI/ESD STM11.11-2021 Electrostatic Discharge Association (ESDA) standards and publications are designed to serve the public interest by eliminating misunderstandings between manufacturers and purchasers, facilitating the interchangeability and improvement of products, and assisting the purchaser in selecting and obtaining the proper product for his particular needs. The existence of such standards and publications shall not in any respect preclude any member or non-member of the Association from manufacturing or selling products not conforming to such standards and publications. Nor shall the fact that a standard or publication that is published by the Association preclude its voluntary use by non-members of the Association whether the document is to be used either domestically or internationally. Recommended standards and publications are adopted by the ESDA in accordance with the ANSI Patent policy. Interpretation of ESDA Standards: The interpretation of standards in-so-far as it may relate to a specific product or manufacturer is a proper matter for the individual company concerned and cannot be undertaken by any person acting for the ESDA. The ESDA Standards Chairman may make comments limited to an explanation or clarification of the technical language or provisions in a standard, but not related to its application to specific products and manufacturers. No other person is authorized to comment on behalf of the ESDA on any ESDA Standard. THE CONTENTS OF ESDAS STANDARDS AND PUBLICATIONS ARE PROVIDED AS-IS, AND ESDA MAKES NO REPRESENTATIONS OR WARRANTIES, EXPRESS OR IMPLIED, OF ANY KIND WITH RESPECT TO SUCH CONTENTS. ESDA DISCLAIMS ALL REPRESENTATIONS AND WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE OR USE, TITLE, AND NON-INFRINGEMENT. ESDA STANDARDS AND PUBLICATIONS ARE CONSIDERED TECHNICALLY SOUND AT THE TIME THEY ARE APPROVED FOR PUBLICATION. THEY ARE NOT A SUBSTITUTE FOR A PRODUCT SELLERS OR USERS OWN JUDGEMENT WITH RESPECT TO ANY PARTICULAR PRODUCT DISCUSSED, AND ESDA DOES NOT UNDERTAKE TO GUARANTEE THE PERFORMANCE OF ANY INDIVIDUAL MANUFACTURERS PRODUCTS BY VIRTUE OF SUCH STANDARDS OR PUBLICATIONS. THUS, ESDA EXPRESSLY DISCLAIMS ANY RESPONSIBILITY FOR DAMAGES ARISING FROM THE USE, APPLICATION, OR RELIANCE BY OTHERS ON THE INFORMATION CONTAINED IN THESE STANDARDS OR PUBLICATIONS. NEITHER ESDA, NOR ITS PRESENT OR FORMER MEMBERS, OFFICERS, EMPLOYEES OR OTHER REPRESENTATIVES WILL BE LIABLE FOR DAMAGES ARISING OUT OF, OR IN CONNECTION WITH, THE USE OR MISUSE OF ESDA STANDARDS OR PUBLICATIONS, EVEN IF ADVISED OF THE POSSIBILITY THEREOF. THIS IS A COMPREHENSIVE LIMITATION OF LIABILITY THAT APPLIES TO ALL DAMAGES OF ANY KIND, INCLUDING WITHOUT LIMITATION, LOSS OF DATA, INCOME OR PROFIT, LOSS OF OR DAMAGE TO PROPERTY AND CLAIMS OF THIRD PARTIES. Published by: Electrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440 Copyright 2021 by EOS/ESD Association, Inc. All rights reserved. No part of this publication may be reproduced in any form, in an electronic retrieval system or otherwise, without the prior written permission of the publisher. Printed in the United States of America ISBN: 1-58537-326-5 CAUTION NOTICE CAUTION NOTICE DISCLAIMER OF WARRANTIES DISCLAIMER OF GUARANTY LIMITATION ON ESDAs LIABILITY ANSI/ESD STM11.11-2021 i (This foreword is not part of ESD Association Standard Test Method ANSI/ESD STM11.11-2021) FOREWORD This standard test method1 was developed to fulfill a need to measure planar materials not provided for by existing ASTM resistivity measurement methods. This procedure is a resistance measurement on the surface of the material and is applied without regard to the samples mechanism of conduction. In cases where it is valid to convert resistance to resistivity, the resistivity values are a factor of ten higher than the resistance values obtained by this test method. This standard test method specifies test fixture configuration, environmental conditions, a systems verification procedure, and test voltages. This test method has been proven to be repeatable within one half-order of magnitude through inter-laboratory tests. This standard test method was originally designated EOS/ESD S11.11-1993 and approved on February 9, 1993. ANSI/ESD STM11.11-2001 was a reaffirmation and redesignation of EOS/ESD S11.11-1993 and was approved on May 20, 2001. ANSI/ESD STM11.11-2006 was a reaffirmation of